外延金属电极、量子点和线在固态量子比特技术中的应用

Quantum bio-informatics V : proceedings of the quantum bio-informatics 2011, Tokyo University of Science, Japan, 7-12 March 2011. Quantum Bio-Informatics (Conference) (5th : 2011 : Tokyo, Japan) Pub Date : 2003-07-23 DOI:10.1117/12.517878

Ludmila I. Aparshina, A. Chernykh, L. Fomin, I. V. Malikov, Valery Y. Vinnichenko, G. Mikhailov

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引用次数: 1

摘要

考虑了在固态量子比特技术中潜在应用的外延金属电极、量子点和导线的制造路线图。所开发的纳米技术包括高质量的低粗糙度薄膜外延、探针光刻和用于制造横向分辨率低至10纳米的外延纳米结构的减法技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Epitaxial metallic electrodes, quantum dots, and wires for application in solid state qubit technology

A road map for the fabrication of epitaxial metallic electrodes, quantum dots and wires is considered for potential application in solid-state qubit technology. The nanotechnology developed includes high quality low-roughness film epitaxy, probe lithography and subtractive techniques for the fabrication of epitaxial nanostructures with a lateral resolution down to 10 nm.

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来源期刊

Quantum bio-informatics V : proceedings of the quantum bio-informatics 2011, Tokyo University of Science, Japan, 7-12 March 2011. Quantum Bio-Informatics (Conference) (5th : 2011 : Tokyo, Japan)

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