{"title":"基于扩展PDMS复合材料的主动液体抽吸和分配","authors":"B. Samel, P. Griss, G. Stemme","doi":"10.1109/MEMSYS.2007.4433160","DOIUrl":null,"url":null,"abstract":"In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"40 1","pages":"565-568"},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Active liquid aspiration and dispensing based on an expanding PDMS composite\",\"authors\":\"B. Samel, P. Griss, G. Stemme\",\"doi\":\"10.1109/MEMSYS.2007.4433160\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"40 1\",\"pages\":\"565-568\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433160\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433160","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Active liquid aspiration and dispensing based on an expanding PDMS composite
In this work we present the development of a liquid aspiration and dispensing unit which is based on a single- use thermally expanding PDMS composite. The composite actuator consists of expandable microspheres incorporated into a PDMS matrix and allows for locally altering its topography by means of individually addressable integrated heaters. Devices were designed in order to enable the generation of a cavity by the expansion of the composite actuator and are entirely fabricated from low-cost materials using wafer-level processes only. The fabricated devices successfully demonstrated controlled liquid aspiration and release thereafter of liquid volumes ranging from 180 nl to 815 nl.