Zr(IV)和Hf(IV)配位化合物的设计- MOCVD合成保护涂层的前驱体

A. Grafov, E. Mazurenko, G. Battiston, P. Zanella
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引用次数: 2

摘要

设计和创造具有不寻常的、可预测的或预先确定的性能的新材料成为现代应用化学最实际的问题之一。讨论了化学气相沉积法合成功能材料时对化合物的主要要求。给出了挥发性含金属前驱体的主要分类。在IGIC-NASU制定的挥发性和热稳定性标准的基础上,我们设计、合成和表征了一系列新的先进的Zr(IV)和Hf(IV)前驱体。将它们的特性与已知物种的特性进行比较。显示了形成最终材料所要求的性能和结构的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design of Zr(IV) and Hf(IV) Co-Ordination Compounds - Precursors for MOCVD Synthesis of Protective Coatings
Design and creation of new materials with unusual, predictable or predeterminated properties become one of the most actual problems of modern applied chemistry. Main demands are discussed, which are made to chemical compounds used in CVD synthesis of functional materials. A division of volatile metal-containing precursors into main classes is given. On the basis of volatility and thermal stabiliti criteria elaborated at IGIC-NASU, we have designed, synthesized and characterized a series of new advanced precursors for Zr(IV) and Hf(IV). Their properties are compared to those of known species. A possibility of formation of requested properties and structure of final materials is shown.
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