集成硅光电池的红外采集微透镜

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659090

Takuro Aonuma, S. Kumagai, M. Sasaki

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引用次数: 0

摘要

在硅光电池背面制备了红外采集微透镜。基于层叠抗蚀剂层的预成形技术可以实现透镜的形状变化。不仅可以实现简单的凸球面形状，还可以实现平面中心平面与球面环的结合。这是为了较短的焦距与红外探测器相结合。硅光电池实现了可见光发电。

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Infrared collecting microlens integrated with Si photo cell

Infrared collecting microlens is prepared at the backside of Si photo cell. The preform technique based on the stacked resist layers can give the shape variation of the lens. Not only the simple convex spherical shape but also the combination of the flat center plane and the spherical surrounding ring can be realized. This is for the shorter focus length to combine with IR detector. The Si photo cell realizes the power generation from the visible light.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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