基于二氧化硅纳米材料的直波导制备

Asnawi, G. Yudoyono, Y. H. Pramono
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引用次数: 2

摘要

薄膜波导的制造技术是通过在玻璃衬底上放置二氧化锡溶液来完成的。直波导的结构由玻片衬底、波导采用氧化锡薄膜和覆盖波导为MMA(甲基丙烯酸甲酯)薄膜组成。制作这种波导的方法是采用自旋镀膜法和光刻技术制备这种波导。制作这种波导的方法是采用自旋镀膜法和光刻技术制备这种波导。在He-Ne激光光源下,利用光学显微镜对直通道波导的输入输出强度进行了分析。结果表明,该多模波导的平均直道厚度为16.67 μm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of Straight Optical Waveguides Based on SnO 2 Nanomaterials
The manufacture technology of thin film waveguides had done by placing a solution of tin dioxide (SnO2) on the glass substrate. The structure of the straight waveguide consists of a slide glass substrate, waveguide using tin oxide film, and the cover waveguide is the MMA (Methyl Methacrylate) film. The method for making this waveguides, the waveguide was fabricated using the spin coating method and photolithography technique. The method for making this waveguides, the waveguide was fabricated using the spin coating method and photolithography technique. Analysis of the intensity of the input and output on a straight channels waveguide is done by an optical microscope with the light source of He-Ne laser. The results have obtained the multimode waveguides with the average thickness of straight channels is 16.67 μm.
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