K. Zang, Xiao Jiang, Y. Huo, Tianzhe Zheng, Yueyang Fei, Xun Ding, M. Morea, M. Xue, Ching-Ying Lu, T. Kamins, Qiang Zhang, Jian-Wei Pan, J. Harris
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Enhanced silicon single-photon avalanche diode based on light trapping
We present a nano-structured light-trapping Si SPAD with improved detection efficiency, without sacrificing jitter distribution or dark count rate. The design can be adopted for CMOS-compatible SPAD image sensors and silicon photomultipliers.
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