最近在Rossendorf使用改进的EGP-10-1串联的经验

H. Matthes
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摘要

自1978年第四次串联会议以来,我们在串联EGP-10-1真空系统的重建和米德尔顿型溅射源的建设上花费了大量的精力。给出了溅射源的运行结果和初步试验结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Recent experiences with the improved EGP-10-1 tandem at Rossendorf

Since the 4th Tandem Conference in 1978 we have spent considerable effort on the reconstruction of the vacuum system of the tandem EGP-10-1 and on the construction of a Middleton type sputter source. Operational results and preliminary test results concerning the sputter source are presented.

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