{"title":"基于MEMS的三轴电化学地震仪","authors":"Wenjie Qi, Chao Xu, Bowen Liu, Xichen Zheng, Tian Liang, Xu She, Jian Chen, Junbo Wang, Deyong Chen","doi":"10.1109/NEMS50311.2020.9265585","DOIUrl":null,"url":null,"abstract":"This paper presents a MEMS based triaxial electrochemical seismometer. The design, fabrication and characterization of the proposed device were included in this article. The MEMS based triaxial electrochemical seismometer has three axes, which are perpendicular and connected to each other, and each axis can independently detect vibrations in the corresponding direction. Compared with uniaxial electrochemical seismometer, the proposed device can directly measure vibrations in any direction, and has a much higher sensitivity.","PeriodicalId":6787,"journal":{"name":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","volume":"4 1","pages":"59-62"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"MEMS Based Triaxial Electrochemical Seismometer\",\"authors\":\"Wenjie Qi, Chao Xu, Bowen Liu, Xichen Zheng, Tian Liang, Xu She, Jian Chen, Junbo Wang, Deyong Chen\",\"doi\":\"10.1109/NEMS50311.2020.9265585\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a MEMS based triaxial electrochemical seismometer. The design, fabrication and characterization of the proposed device were included in this article. The MEMS based triaxial electrochemical seismometer has three axes, which are perpendicular and connected to each other, and each axis can independently detect vibrations in the corresponding direction. Compared with uniaxial electrochemical seismometer, the proposed device can directly measure vibrations in any direction, and has a much higher sensitivity.\",\"PeriodicalId\":6787,\"journal\":{\"name\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"volume\":\"4 1\",\"pages\":\"59-62\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS50311.2020.9265585\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 15th International Conference on Nano/Micro Engineered and Molecular System (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS50311.2020.9265585","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents a MEMS based triaxial electrochemical seismometer. The design, fabrication and characterization of the proposed device were included in this article. The MEMS based triaxial electrochemical seismometer has three axes, which are perpendicular and connected to each other, and each axis can independently detect vibrations in the corresponding direction. Compared with uniaxial electrochemical seismometer, the proposed device can directly measure vibrations in any direction, and has a much higher sensitivity.
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