M. Pfeiffer, Junqiu Liu, T. Morais, B. Ghadiani, T. Kippenberg
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Photonic Damascene process with reflow step for ultra-smooth Si3N4 waveguides
We present ultra-smooth silicon nitride waveguides fabricated by the photonic Damascene process extended with a novel reflow step. This leads to record Q-factors for tightly confining waveguides with anomalous dispersion.
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