纳米压印光刻技术制备基于表面光栅的分布式反馈激光器

2008 IEEE International Conference on Semiconductor Electronics Pub Date : 2008-12-09 DOI:10.1109/SMICND.2008.4703337

J. Viheriala, A. Laakso, M. Dumitrescu, J. Tommila, K. Haring, T. Leinonen, S. Ranta, M. Pessa

{"title":"纳米压印光刻技术制备基于表面光栅的分布式反馈激光器","authors":"J. Viheriala, A. Laakso, M. Dumitrescu, J. Tommila, K. Haring, T. Leinonen, S. Ranta, M. Pessa","doi":"10.1109/SMICND.2008.4703337","DOIUrl":null,"url":null,"abstract":"Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.","PeriodicalId":6406,"journal":{"name":"2008 IEEE International Conference on Semiconductor Electronics","volume":"7 1","pages":"95-98"},"PeriodicalIF":0.0000,"publicationDate":"2008-12-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Surface-grating-based distributed feedback lasers fabricated using nanoimprint lithography\",\"authors\":\"J. Viheriala, A. Laakso, M. Dumitrescu, J. Tommila, K. Haring, T. Leinonen, S. Ranta, M. Pessa\",\"doi\":\"10.1109/SMICND.2008.4703337\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.\",\"PeriodicalId\":6406,\"journal\":{\"name\":\"2008 IEEE International Conference on Semiconductor Electronics\",\"volume\":\"7 1\",\"pages\":\"95-98\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-12-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 IEEE International Conference on Semiconductor Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2008.4703337\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE International Conference on Semiconductor Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2008.4703337","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

利用低成本的纳米压印光刻技术，制备了由脊状波导横向波纹获得三阶表面光栅的分布反馈激光器。在980 nm波长范围内发射的激光器具有稳定的单纵模工作，侧模抑制比高达50 dB。

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Surface-grating-based distributed feedback lasers fabricated using nanoimprint lithography

Distributed feedback lasers with third-order surface gratings obtained by lateral corrugations of the ridge waveguide have been fabricated using low-cost nanoimprint lithography. The lasers, emitting in the 980 nm wavelength range exhibited stable single-longitudinal-mode operation with side-mode suppression ratios up to 50 dB.

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来源期刊

2008 IEEE International Conference on Semiconductor Electronics

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