{"title":"基于原子针孔相机的纳米光刻技术在超材料制造中的应用","authors":"P.N. Melentiev , A.V. Zablotskiy , A.A. Kuzin , D.A. Lapshin , A.S. Baturin , V.I. Balykin","doi":"10.1016/j.metmat.2009.08.003","DOIUrl":null,"url":null,"abstract":"<div><p><span><span>We have experimentally realized a method of images construction in atom optics, based on the idea of optical pinhole camera. Generation of identical images with maximum resolution has been explored. With the use of an atom pinhole camera we have built on a Si and glass surfaces an array of identical arbitrary-shape atomic </span>nanostructures with the minimum size of an individual nanostructure’s element down to 50</span> <span>nm. Limitations of the approach for fabrication of metamaterials are discovered.</span></p></div>","PeriodicalId":100920,"journal":{"name":"Metamaterials","volume":"3 3","pages":"Pages 157-164"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/j.metmat.2009.08.003","citationCount":"4","resultStr":"{\"title\":\"Nanolithography based on an atom pinhole camera for fabrication of metamaterials\",\"authors\":\"P.N. Melentiev , A.V. Zablotskiy , A.A. Kuzin , D.A. Lapshin , A.S. Baturin , V.I. Balykin\",\"doi\":\"10.1016/j.metmat.2009.08.003\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p><span><span>We have experimentally realized a method of images construction in atom optics, based on the idea of optical pinhole camera. Generation of identical images with maximum resolution has been explored. With the use of an atom pinhole camera we have built on a Si and glass surfaces an array of identical arbitrary-shape atomic </span>nanostructures with the minimum size of an individual nanostructure’s element down to 50</span> <span>nm. Limitations of the approach for fabrication of metamaterials are discovered.</span></p></div>\",\"PeriodicalId\":100920,\"journal\":{\"name\":\"Metamaterials\",\"volume\":\"3 3\",\"pages\":\"Pages 157-164\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-11-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/j.metmat.2009.08.003\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Metamaterials\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S1873198809000255\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Metamaterials","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S1873198809000255","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanolithography based on an atom pinhole camera for fabrication of metamaterials
We have experimentally realized a method of images construction in atom optics, based on the idea of optical pinhole camera. Generation of identical images with maximum resolution has been explored. With the use of an atom pinhole camera we have built on a Si and glass surfaces an array of identical arbitrary-shape atomic nanostructures with the minimum size of an individual nanostructure’s element down to 50nm. Limitations of the approach for fabrication of metamaterials are discovered.
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