使用pi -铜薄膜的人造皮肤的设计与制造

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) Pub Date : 2007-01-01 DOI:10.1109/MEMSYS.2007.4433149

Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan

{"title":"使用pi -铜薄膜的人造皮肤的设计与制造","authors":"Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan","doi":"10.1109/MEMSYS.2007.4433149","DOIUrl":null,"url":null,"abstract":"This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.","PeriodicalId":6388,"journal":{"name":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2007-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"23","resultStr":"{\"title\":\"Design and fabrication of an artificial skin using PI-copper films\",\"authors\":\"Ming-Yuan Cheng, W.-Y. Chang, L. Tsao, S.-A. Yang, Y. Yang, W. Shih, F. Chang, S. Chang, K. Fan\",\"doi\":\"10.1109/MEMSYS.2007.4433149\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.\",\"PeriodicalId\":6388,\"journal\":{\"name\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"23\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2007.4433149\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2007.4433149","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 23

摘要

本文介绍了一种柔性的8 × 8温度和触觉传感阵列的设计、制造和测量，该阵列将用作机器人的人造皮肤。采用微加工技术将温度和压力传感元件异质集成在柔性铜- pi薄膜上。触觉传感元件是通过在预先定义的数字间铜电极上分配导电聚合物来制造的。采用离散式温度传感器芯片作为温度传感元件。实现了扫描电路，并给出了实验结果。

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Design and fabrication of an artificial skin using PI-copper films

This paper presents the design, fabrication and measurement of a flexible 8 times 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and pressure sensing elements are heterogeneously integrated on a flexible copper-PI film using micromachining techniques. The tactile sensing elements are fabricated by dispensing conductive polymer on the pre-defined inter-digital copper electrodes. Discrete temperature sensor chips are employed as the temperature sensing elements. Scanning circuits are implemented and experimental results are also provided.

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来源期刊

2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS)

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