激光诱导Si纳米粒子及其RGB共振滤色器的应用

Eui Sun Hwang, Min Jin Kang, B. Cheong
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引用次数: 0

摘要

在各种光学器件中,人们对纳米粒子的光学共振进行了长期的研究。然而,均匀纳米颗粒的制备困难阻碍了其应用。在此,我们通过激光照射在非晶硅薄膜上形成了具有均匀尺寸的硅纳米颗粒,并发现了由硅纳米颗粒产生的红、绿、蓝(RGB)光共振。利用高斯光斑光束对波长为355 nm的纳秒激光进行二维扫描,在150~200 mJ/cm2的激光影响下,获得了100~200 nm的硅纳米颗粒。我们证明了颜色共振可以调整为红色,绿色和蓝色的激光能量和扫描间距。扫描电镜(SEM)表征了Si纳米颗粒的尺寸和分布,发现Si纳米颗粒呈椭球状,嵌入在残余Si层中。利用暗场显微镜和光纤耦合光谱对其光学特性进行了测量。RGB样品的峰值波长分别为628 nm、570 nm和495 nm,与Mie理论预测的偶极子共振有关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser-induced Si nanoparticles and the application of RGB resonance color-filters
Optical resonances of nanoparticle have been studied for a long time in various optical devices. However, the difficulties in fabrication of uniform nanoparticles hinders the applications. Herein, we formed Si nanoparticles having a uniform size via laser irradiation on an amorphous-Si thin film and found the optical resonances of red, green, and blue (RGB) colors originated from the Si nanoparticles. Two-dimensional scanning of 355-nm wavelength of nanosecond laser with a Gaussian spot beam created Si nanoparticles of 100~200 nm at laser fluences of 150~200 mJ/cm2 . We demonstrated the color resonances could be tuned to red, green, and blue adjusting the laser fluence and scan pitch. The size and distribution are characterized by scanning electron microscopy (SEM), which revealed the Si nanoparticles are ellipsoidal shape, embedded in the residual Si layer. The optical properties are measured by dark field microscopy and fiber coupled spectroscopy. The RGB samples show peak wavelengths of 628 nm, 570 nm, and 495 nm, respectively, which are attributed to the dipole resonance as predicted by the Mie theory.
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