放电对硅烷和氨的影响

J. Drake, N. Westwood
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引用次数: 4

摘要

讨论了臭氧发生器型无声放电和微波放电对硅烷、氨和硅烷-氨混合物的影响。在后者的微波放电中形成氮化硅薄膜。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of electrical discharge on silane and ammonia
The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.
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