在法布里-珀罗腔中使用铁电薄膜进行大电光调制

Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1994-08-07 DOI:10.1109/ISAF.1994.522460

Feiling Wang, G. Haertling

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引用次数: 2

摘要

我们报道了一种反射薄膜铁电光调制器，其光相位调制可达50度，光强度调制的开/关信号比为20。通过多次反射实现了较大的光调制。采用铁电(FE) PLZT薄膜材料作为调制介质，该薄膜材料沉积在镀有pt涂层的硅衬底上。在铁电薄膜上沉积了氧化铟锡(ITO)薄层作为顶电极。He-Ne激光束斜入射到ITO/FE/Pt结构上。当电压信号加到ITO和Pt电极上时，在薄膜结构反射的激光束中检测到光调制。与传输模式调制器不同，空气- ito和FE-Pt界面之间的铁电薄膜夹层表现出法布里-珀罗标准子的特性。在Fabry-Perot峰附近，获得了比传输装置显著增强的光调制。讨论了调制器的设计原理和性能。

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Large electrooptic modulation using ferroelectric thin films in a Fabry-Perot cavity

We report a reflective thin film ferroelectric light modulator which has exhibited optical phase modulation as large as fifty degrees and on/off signal ratio of twenty for intensity modulation. The large optical modulation was achieved by means of multiple reflection. A ferroelectric (FE) PLZT thin film material, deposited on Pt-coated silicon substrate, was used as the modulating medium. An indium-tin oxide (ITO) thin layer was deposited on the ferroelectric films as the top electrode. A He-Ne laser beam was obliquely incident on the ITO/FE/Pt structure. The light modulation was detected in the laser beam reflected from the thin film structure when a voltage signal was applied to the ITO and Pt electrodes. Unlike transmission-mode modulators, the sandwich of the ferroelectric films between the air-ITO and FE-Pt interfaces exhibited characteristics of a Fabry-Perot etalon. Near a Fabry-Perot peak, drastically enhanced light modulation than transmission devices was obtained. Design principles and the performance of the modulator are discussed.

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Proceedings of 1994 IEEE International Symposium on Applications of Ferroelectrics

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