新型双向电热致动器的研制及其在射频MEMS开关中的应用

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-09-25 DOI:10.1109/NEMS.2014.6908786

Yanqing Zhu, Lei Han, M. Qin, Qing‐An Huang, Ming-xia Jiang

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引用次数: 3

摘要

本文介绍了一种电热驱动MEMS(微机电系统)执行器的设计和测试结果。与传统的单向热致动器不同，这种平面内双向电热致动器可以作为一个装置在两个方向上产生位移。并提出了由该级联电热致动器驱动的射频MEMS开关。由于这种双向执行器，所提出的开关不仅可以实现off状态到on状态的转换，还可以提供额外的深度off状态。在深OFF状态下，在0 ~ 40 GHz的整个频率范围内，可实现优于-30 dB的隔离。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Development of a novel bidirectional electrothermal actuator and its application to RF MEMS switch

This paper presents the design and testing results of an electrothermally driven MEMS (microelectromechanical systems) actuator. Different from conventional uni-directional thermal actuators, this in-plane bi-directional electrothermal actuator is capable of producing displacements in two directions as a single device. The RF MEMS switch driven by this cascaded electrothermal actuator is also proposed. Due to this bidirectional actuator, the proposed switch can not only realize the OFF-state to ON-state shifting but also provide an additional deep OFF-state. At the deep OFF state, the isolation better than -30 dB can be achieved at the whole frequency range of 0 ~ 40 GHz.

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The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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