一种Nb5N6微测热仪太赫兹相机

2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) Pub Date : 2021-08-29 DOI:10.1109/IRMMW-THz50926.2021.9567095

Shuyu Zhou, Zhenjie Li, Pengfei Chen, X. Tu, Chengtao Jiang, Yichen Zhang, Qianghua Wu, Mengxin Liu, X. Jia, L. Kang, Jian Chen, Peiheng Wu

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引用次数: 0

摘要

本文主要介绍了本课题组在太赫兹相机方面的最新进展。Nb5N6薄膜是一种太赫兹敏感材料，在太赫兹探测中具有重要的应用前景。我们利用该材料在室温下制作了天线耦合微热计太赫兹探测器阵列，并集成了180 nm CMOS工艺读出电路。太赫兹相机的分辨率为32×32，像素尺寸为250×250 μm，帧率为30，工作范围为0.25-1太赫兹。与热电红外摄像机相比，1太赫兹以下的太赫兹光谱具有明显的优势，具有更高的响应速率和更低的NEP。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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An Nb5N6 microbolometer THz camera

This article mainly introduces our research group’s latest progress in THz camera. Nb5N6 film is a THz sensitive material and has a significant prospect in THz detection. We use this material to fabricate an antenna coupled microbolometer THz detector array at room temperature, and integrated 180 nm CMOS process readout circuit. The THz camera has a resolution of 32×32, pixel size of 250×250 μm, frame rate of 30, working range is 0.25-1 THz. Compared with the type of pyro-electric infrared camera, below 1 THz terahertz spectrum has significant advantages, with a higher response rate and a lower NEP.

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2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz)

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