超高灵敏度槽式微环谐振器声传感器的设计

IF 2.3 4区物理与天体物理 Q2 OPTICS

Fiber and Integrated Optics Pub Date : 2022-07-04 DOI:10.1080/01468030.2022.2145529

Xiaoxia Chu, Jiangong Cui, Min Zhu, Rongyu Zhao, Wendong Zhang, Guojun Zhang, Renxin Wang, Yuhua Yang, Yongfeng Ren

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引用次数: 0

摘要

提出了一种采用PDMS封装的缝隙微环谐振腔声学传感器(MRAS)，实现了超高灵敏度的声学检测。对传感器的声探测原理进行了理论分析，对传感器的结构参数进行了优化，并通过仿真验证了传感器的性能。仿真结果表明，该传感器的质量因数为1.49 × 106，强度检测灵敏度可达3872 mV/kPa, 3db带宽为210 MHz。本文设计的传感器具有超高灵敏度和宽带宽范围的优点，在声学探测领域具有重要的应用价值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design of Ultra-High Sensitivity Slot Micro-ring Resonator Acoustic Sensor

ABSTRACT A slot microring resonator acoustic sensor (MRAS) using the PDMS package was proposed to achieve ultra-high sensitivity acoustic detection. The acoustic detection principle of the sensor is analyzed theoretically, the structural parameters are optimized and the performance of the sensor is verified by simulation. The simulation results show that the proposed slot MRAS has a high-quality factor of 1.49 × 106, the sensitivity of the sensor by intensity detection method is up to 3872 mV/kPa, and the 3 dB bandwidth is 210 MHz. The sensor designed in this paper has the advantages of ultra-high sensitivity and wide bandwidth range, which has important value in the field of acoustic detection.

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来源期刊

Fiber and Integrated Optics 物理-光学

CiteScore

3.40

自引率

0.00%

发文量

审稿时长

>12 weeks

期刊介绍： Fiber and Integrated Optics , now incorporating the International Journal of Optoelectronics, is an international bimonthly journal that disseminates significant developments and in-depth surveys in the fields of fiber and integrated optics. The journal is unique in bridging the major disciplines relevant to optical fibers and electro-optical devices. This results in a balanced presentation of basic research, systems applications, and economics. For more than a decade, Fiber and Integrated Optics has been a valuable forum for scientists, engineers, manufacturers, and the business community to exchange and discuss techno-economic advances in the field.