{"title":"MOD沉积了基于薄膜BST的体声波谐振器","authors":"T. Kalkur, N. Sbrockey, G. Tompa","doi":"10.1109/ISAF.2012.6297726","DOIUrl":null,"url":null,"abstract":"A tunable BST solidly mounted bulk resonator has been designed, fabricated and characterized using vector network analyzer. The solidly mounted resonator was implemented using an acoustic Bragg reflector of alternating high impedance tantalum oxide and low impedance silicon layers. The films were deposited using spin-on MOD technique. The resonator demonstrated a frequency tunability of 1% for an applied bias voltage from 3V to 10V with a shift in resonance frequency from 4.232179 GHz to 4.184941 GHz. The quality factor of the resonator was found to depend on the applied bias and a maximum quality factor of 97 was obtained at a DC bias voltage of 10 volts.","PeriodicalId":20497,"journal":{"name":"Proceedings of ISAF-ECAPD-PFM 2012","volume":"22 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"MOD deposited thin film BST based bulk acoustic wave resonators\",\"authors\":\"T. Kalkur, N. Sbrockey, G. Tompa\",\"doi\":\"10.1109/ISAF.2012.6297726\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A tunable BST solidly mounted bulk resonator has been designed, fabricated and characterized using vector network analyzer. The solidly mounted resonator was implemented using an acoustic Bragg reflector of alternating high impedance tantalum oxide and low impedance silicon layers. The films were deposited using spin-on MOD technique. The resonator demonstrated a frequency tunability of 1% for an applied bias voltage from 3V to 10V with a shift in resonance frequency from 4.232179 GHz to 4.184941 GHz. The quality factor of the resonator was found to depend on the applied bias and a maximum quality factor of 97 was obtained at a DC bias voltage of 10 volts.\",\"PeriodicalId\":20497,\"journal\":{\"name\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"volume\":\"22 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of ISAF-ECAPD-PFM 2012\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2012.6297726\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of ISAF-ECAPD-PFM 2012","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2012.6297726","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
MOD deposited thin film BST based bulk acoustic wave resonators
A tunable BST solidly mounted bulk resonator has been designed, fabricated and characterized using vector network analyzer. The solidly mounted resonator was implemented using an acoustic Bragg reflector of alternating high impedance tantalum oxide and low impedance silicon layers. The films were deposited using spin-on MOD technique. The resonator demonstrated a frequency tunability of 1% for an applied bias voltage from 3V to 10V with a shift in resonance frequency from 4.232179 GHz to 4.184941 GHz. The quality factor of the resonator was found to depend on the applied bias and a maximum quality factor of 97 was obtained at a DC bias voltage of 10 volts.
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