35 GHz开腔等离子体诊断研究

2021 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting (APS/URSI) Pub Date : 2021-12-04 DOI:10.1109/APS/URSI47566.2021.9704534

Yihang Tu, E. Li, Lin Qin, Yang Qiu

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引用次数: 0

摘要

本文介绍了一种35 GHz开腔等离子体诊断系统。谐振器将封闭腔与天线结合在一起。根据空穴耦合理论，可以将腔内的谐振模式转换为天线的传播模式。等离子体加载后，会影响天线的反射系数，从而干扰腔内的谐振模式。鉴于这一现象，将实现基于共振理论的等离子体电子密度($N_{e}$)的测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Research on Open Resonator at 35 GHz for Plasma Diagnosis

This paper presents an open resonator at 35 GHz for plasma diagnosis. The resonator combines the closed cavity with the antenna. According to the hole coupling theory, the resonant mode in the cavity can be converted into the propagation mode of the antenna. After the plasma is loaded, the reflection coefficient of the antenna will be affected, thereby disturbing the resonance mode in the cavity. In view of the phenomenon, a measurement for the plasma electron density ($N_{e}$) based on resonance theory will be realized.

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来源期刊

2021 IEEE International Symposium on Antennas and Propagation and USNC-URSI Radio Science Meeting (APS/URSI)

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