控制In/sub 2/O/sub 3/薄膜气体传感器响应速率的过程

IF 0.1 0 THEATER
G. Korotcenkov, V. Brinzari, M. Ivanov, I. Blinov, J. Stetter
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引用次数: 1

摘要

本文分析了In/sub 2/O/sub 3/基薄膜气体传感器对还原性和氧化性气体的响应动力学。综述了工作温度、空气湿度和膜厚(d从20 ~ 400 nm)对气体响应E/sub /和时间常数的影响。提出了能够解释In/sub 2/O/sub 3/与还原性和氧化性气体相互作用的特定特征的模型概念。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Processes controlling the rate of In/sub 2/O/sub 3/ thin film gas sensor's response
The kinetics of gas response to reducing and oxidizing gases of In/sub 2/O/sub 3/-based thin film gas sensors is analyzed in this report. The influence of operating temperature, air humidity and film thickness (d from 20 to 400 nm) on both the E/sub act/ and time constants of gas response is reviewed. Model conceptions allowing to explain specific character of In/sub 2/O/sub 3/ interaction with reducing and oxidizing gases are proposed.
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Teatro e Storia
Teatro e Storia THEATER-
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