10-50 /spl亩/米比例尺线和空间电路图形三维磁光近场制图

LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) Pub Date : 2001-11-12 DOI:10.1109/LEOS.2001.969303

E. Yamazaki, S. Wakana, M. Kishi, M. Iwanami, S. Hoshino, A. Tsuchiya

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引用次数: 6

摘要

我们报道了在精细电路模式上的磁场近场分布的第一个精细x-z映射实验。利用光纤边缘磁光(FEMO)探头结构可以获得所需的三维空间分辨率。电磁场的三维映射技术在精细电路的情况下提供了更多关于垂直(z)方向精细变化的信息。电光/磁光(EO/MO)探测技术具有宽带宽、高灵敏度、低侵入性和相对高的空间分辨率等优点，有望实现这一目标。

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Three-dimensional magneto-optic near-field mapping over 10-50 /spl mu/m-scale line and space circuit patterns

We report on the first fine x-z mapping experiment of magnetic near-field distribution over fine circuit patterns. Required three-dimensional (3D) spatial resolution was brought about by utilizing the fiber-edged magneto-optic (FEMO) probe structure. The 3D mapping technique of electromagnetic fields provides more information about finer variations in the vertical (z) direction in cases of finer circuits. The electro-optic/magneto-optic (EO/MO) probing techniques are promising toward this purpose since one can take its attractive natures such as wide-bandwidth, high-sensitivity, low invasiveness, and relatively high-spatial-resolution.

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LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)

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