N+注入延缓和抑制硅化镍的形成

{"title":"N+注入延缓和抑制硅化镍的形成","authors":"D. M. Scott, L. Wielunski, H. Seefeld, M. Nicolet","doi":"10.1016/0029-554X(81)90793-X","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100971,"journal":{"name":"Nuclear Instruments and Methods","volume":"5 1","pages":"661-666"},"PeriodicalIF":0.0000,"publicationDate":"1981-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":"{\"title\":\"Retardation and suppression of nickel silicide formation by N+ implantation\",\"authors\":\"D. M. Scott, L. Wielunski, H. Seefeld, M. Nicolet\",\"doi\":\"10.1016/0029-554X(81)90793-X\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":100971,\"journal\":{\"name\":\"Nuclear Instruments and Methods\",\"volume\":\"5 1\",\"pages\":\"661-666\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1981-04-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"14\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments and Methods\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/0029-554X(81)90793-X\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/0029-554X(81)90793-X","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}