多孔低k介电材料:材料特性

{"title":"多孔低k介电材料:材料特性","authors":"B. Turk, Terence Wong, R. Schwarzenbacher, E. Jarrell, S.H.C. Tyberg, Elbert E. Huang, J. Hedrick, E. Simonyi, Stephen M. Gates, Stephan A. Cohen, K. Malone, H. Wickland, M. Sankarapandian, M. Toney, Ho-Cheol Kim, Robert D. Miller, W. Volksen, P. Rice, L. Lurio","doi":"10.1021/bk-2004-0874.ch012","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":7648,"journal":{"name":"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry","volume":"48 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2005-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Porous low-k dielectrics: Material properties\",\"authors\":\"B. Turk, Terence Wong, R. Schwarzenbacher, E. Jarrell, S.H.C. Tyberg, Elbert E. Huang, J. Hedrick, E. Simonyi, Stephen M. Gates, Stephan A. Cohen, K. Malone, H. Wickland, M. Sankarapandian, M. Toney, Ho-Cheol Kim, Robert D. Miller, W. Volksen, P. Rice, L. Lurio\",\"doi\":\"10.1021/bk-2004-0874.ch012\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":7648,\"journal\":{\"name\":\"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry\",\"volume\":\"48 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2005-06-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1021/bk-2004-0874.ch012\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"American Chemical Society, Polymer Preprints, Division of Polymer Chemistry","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1021/bk-2004-0874.ch012","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}