MEMS注入锁定激光器

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1496437

X.M. Zhang, A. Liu, H. Cai, C. Lu, D. Tang

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引用次数: 0

摘要

本文报道了一种利用MEMS技术构建的注入锁定激光器(ILL)器件，为原子表提供波长稳定的激光源。该器件主要由MEMS可调谐激光器和采用外注入方案的FP激光芯片组成。注入锁定与MEMS技术相结合，在小尺寸(3mm /spl次/ 2mm /spl次/ 0.6 mm)下实现了稳定的波长(< /spl plusmn/0.002 nm);两者对原子表都至关重要。

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MEMS injection-locked laser

The paper reports an injection-locked laser (ILL) device constructed by MEMS technology to provide a wavelength-stabilized laser source for atomic watches. The device mainly consists of a MEMS tunable laser and a FP laser chip using a scheme of external injection. The combination of the injection locking and the MEMS technology brings about stabilized wavelength (< /spl plusmn/0.002 nm) at a small size (3 mm /spl times/ 2 mm /spl times/ 0.6 mm); both are crucial for atomic watches.

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来源期刊

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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