铁在多晶硅片中的光致发光成像

Yang-Chieh Fan, J. Tan, Sieu Pheng Phang, D. Macdonald
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引用次数: 3

摘要

我们扩展了最近基于光致发光(PL)成像和铁硼对离解的间质铁成像技术的发展。该方法最好应用于寿命交叉点以下,以避免在PL测量期间FeB对断裂。我们已经将这种高分辨率铁成像技术应用于来自铸锭不同部分的一系列多晶硅片,包括磷捕集之前和之后。以这种方式生成的溶解铁浓度的高空间分辨率百万像素图像有助于更好地理解铁在这种材料中的行为,以及它对细胞处理步骤的反应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Iron imaging in multicrystalline silicon wafers via photoluminescence
We have extended the development of a recent interstitial iron imaging technique based on photoluminescence (PL) imaging and iron-boron pair dissociation. The method is best applied below the lifetime crossover point, in order to avoid FeB pair breaking during the PL measurements. We have applied this high resolution iron imaging technique to a range of multicrystalline silicon wafers from different parts of an ingot, both before and after phosphorus gettering. The high spatial resolution mega-pixel images of the dissolved iron concentration generated in this way help to better understand the behavior of iron in this material, and it's response to cell processing steps.
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