{"title":"离子辅助沉积薄膜中的低损耗波导","authors":"L.N. Binh, R.P. Netterfield, P.J. Martin","doi":"10.1016/0378-5963(85)90198-9","DOIUrl":null,"url":null,"abstract":"<div><p>Reduction in the scattering losses of ZrO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, CeO<sub>2</sub> and Ta<sub>2</sub>O<sub>5</sub> waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al<sub>2</sub>O<sub>3</sub> ion-assisted film using 1200 eV O<sub>2</sub><sup>1</sup>. These losses are of the order of 2–5 dB cm<sup>−1</sup> and compare with > 15–20 dB cm<sup>1</sup> for evaporated guides produced without ion assistance.</p></div>","PeriodicalId":100105,"journal":{"name":"Applications of Surface Science","volume":"22 ","pages":"Pages 656-662"},"PeriodicalIF":0.0000,"publicationDate":"1985-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://sci-hub-pdf.com/10.1016/0378-5963(85)90198-9","citationCount":"17","resultStr":"{\"title\":\"Low-loss waveguiding in ion-assisted-deposited thin films\",\"authors\":\"L.N. Binh, R.P. Netterfield, P.J. Martin\",\"doi\":\"10.1016/0378-5963(85)90198-9\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><p>Reduction in the scattering losses of ZrO<sub>2</sub>, Al<sub>2</sub>O<sub>3</sub>, CeO<sub>2</sub> and Ta<sub>2</sub>O<sub>5</sub> waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al<sub>2</sub>O<sub>3</sub> ion-assisted film using 1200 eV O<sub>2</sub><sup>1</sup>. These losses are of the order of 2–5 dB cm<sup>−1</sup> and compare with > 15–20 dB cm<sup>1</sup> for evaporated guides produced without ion assistance.</p></div>\",\"PeriodicalId\":100105,\"journal\":{\"name\":\"Applications of Surface Science\",\"volume\":\"22 \",\"pages\":\"Pages 656-662\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1985-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"https://sci-hub-pdf.com/10.1016/0378-5963(85)90198-9\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applications of Surface Science\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/0378596385901989\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applications of Surface Science","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/0378596385901989","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
摘要
利用离子辅助蒸发技术，在BK-7玻璃衬底上制备的ZrO2、Al2O3、CeO2和Ta2O5波导的散射损耗降低。用1200 eV O21制备的Al2O3离子辅助薄膜的损耗最小。这些损耗在2-5 dB cm−1量级，与>15-20 dB cm2的蒸发指南生产没有离子协助。
Low-loss waveguiding in ion-assisted-deposited thin films
Reduction in the scattering losses of ZrO2, Al2O3, CeO2 and Ta2O5 waveguides fabricated on BK-7 glass substrates using ion-assisted evaporation techniques has been achieved. The lowest losses have been observed for an Al2O3 ion-assisted film using 1200 eV O21. These losses are of the order of 2–5 dB cm−1 and compare with > 15–20 dB cm1 for evaporated guides produced without ion assistance.
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