表面分析用硅烷掺杂惰性气体环境中样品的无氧传输

IF 1.4 4区工程技术

Journal of Vacuum Science & Technology B Pub Date : 2021-09-01 DOI:10.1116/6.0001180

R. Gustus, Maik Szafarska, W. Maus‐Friedrichs

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引用次数: 9

摘要

我们报告了一种新的方法，以运输样品安全的表面分析从氧化在长距离。该输运方法是基于硅烷掺杂惰性气体作为输运介质。在本文中，我们证明了在硅烷的帮助下，可以产生氧含量小于10 - 15毫巴的高纯度惰性气体气氛。此外，我们证明了与商业上可用的惰性气体相比，硅烷掺杂的惰性气体气氛可以有效地用于储存和安全运输氧化样品。为此，对通过样品运输不同阶段的高活性钛样品进行了表面敏感测量。测量结果显示，硅烷掺杂的大气没有发生明显的氧化。然而，从大气中观察到氧化硅的吸附。

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Oxygen-free transport of samples in silane-doped inert gas atmospheres for surface analysis

We report on a new approach to transport samples for surface analysis safely from oxidation over long distances. The transport method is based on silane-doped inert gases, which are used as a transport medium. In this paper, we show that with the help of silane, highly purified inert gas atmospheres with oxygen contents of less than 10−15 mbar can be generated. In addition, we demonstrate that compared to commercially available inert gases, silane-doped inert gas atmospheres can be efficiently used to store and transport samples safely from oxidation. For this, surface sensitive measurements on highly reactive titanium samples, which passed the different stages of samples transport, were performed. The measurements revealed that no pronounced oxidation by the silane-doped atmosphere takes place. However, adsorption of silicon oxide from the atmosphere was observed.

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来源期刊

Journal of Vacuum Science & Technology B 工程技术-工程：电子与电气

自引率

14.30%

发文量

审稿时长

2.5 months

期刊介绍： Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.