基于波导耦合纳米力学光子晶体腔的片上光电流位移传感器

2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Pub Date : 2019-10-17 DOI:10.1109/CLEOE-EQEC.2019.8871530

F. Galeotti, I. S. Vollenbroek, M. Petruzzella, F. Pagliano, F. V. van Otten, Ž. Zobenica, H. S. Marnani, A. Mohtashami, R. W. van der Heijden, A. Fiore

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引用次数: 1

摘要

提出了一种用于位移传感的纳米光电机械传感器。它由集成电光读出和片上光传输的双膜光子晶体腔组成。通过原子力显微镜驱动和光电流传感对其进行了验证。

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On-Chip Photocurrent Displacement Sensor Based on a Waveguide-Coupled Nanomechanical Photonic Crystal Cavity

A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.

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来源期刊

2019 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)

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