利用激光汤姆逊散射研究高压下平衡供能的甚高频氩等离子体

Weiting Chen, K. Ogiwara, 荻原 公平, Koichiro Koge, 神家 幸一郎, K. Tomita, 冨田 健太郎, K. Uchino, 内野 喜一郎, Y. Kawai, 河合 良信, コウヘイ ハギワラ, コウイチロウ コウゲ, ケンタロウ トミタ, キイチロウ ウチノ, ヨシノブ カワイ
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引用次数: 0

摘要

利用激光汤姆逊散射法研究了VHF等离子体参数与气体压力和功率的关系,其中VHF等离子体在高压区采用平衡供能方法产生。结果表明,在高压条件下,平衡送电方法可提供高电子密度、低电子温度的等离子体。这一特性通过使用二维模拟代码的计算得到了证实。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of VHF Argon Plasma at High Pressure by Balanced Power Feeding Using Laser Thomson Scattering
The dependences of the VHF plasma parameters on the gas pressure and power were examined by using the Laser Thomson scattering method, where the VHF plasma was produced in the high pressure region by the balanced power feeding method. It was found that the balanced power feeding method provides a high electron density plasma with low electron temperature at high pressures. This characteristics were confirmed by calculations using a 2-dimensional simulation code.
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