从微加工到纳米加工的激光精密工程

2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science Pub Date : 2008-05-04 DOI:10.1109/CLEO.2008.4551308

Minghui Hong, Z. Q. Huang, Yu-Sheng Lin, J. Yun, Leng Seow Tan, Luping Shi, Tow Chong Chong

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引用次数: 51

摘要

激光精密工程具有非接触加工、安装灵活、在空气中高速加工等独特优势。在过去的几十年里，我们见证了它在各种生产线上的广泛应用。与其他先进的加工工具相结合，激光纳米制造将在下一代制造中发挥更重要的作用。

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Laser precision engineering from microfabrication to nanoprocessing

Laser precision engineering has unique advantages of non-contact process, flexible setup and high speed processing in air. In the last decades, we have witnessed its extensive applications in various production lines. Combined with other advanced processing tools, laser nanofabrication will play a much more important role in the next generation manufacturing.

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2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science

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