用拓扑优化方法设计MEMS驱动器

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2006-01-01 DOI:10.1109/NEMS.2006.334820

Kongtian Zuo, Yudong Zhao, Yong-gao Xie, Liping Chen

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引用次数: 2

摘要

拓扑优化方法是一种新颖的MEMS执行器设计方法。本文将多目标设计方法引入到MEMS作动器的拓扑优化中。深入研究了MEMS作动器多目标设计的一些重要因素。提出了一种基于结构柔度最小和结构输出位移最大的多目标拓扑优化方法，并建立了相应的拓扑优化控制方程。针对多目标MEMS致动器的拓扑优化设计，提出了伴随法的灵敏度分析方法。同时，采用GCMMA(全局收敛版的移动渐近线法)算法进行优化。两个MEMS作动器的数值算例验证了上述理论和算法的有效性

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Design MEMS Actuators with Topology Optimization Method

Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm

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2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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