Optimized Driving Force Control of a Planar Micro-Robot Using Friction Drive Mechanism

This paper presents a new generation of compliant piezoelectric microconveyers for microobjects based on the cooperation of arrayed direct-drive standing wave ultrasonic actuators. A method using an equivalent electromechanical circuit is proposed for estimating and analysing the optimum driving force. On the basis of the proposed method, the friction drive optimization of the micro-robot is performed through the implementation of an electromagnetic field-based preload controller. Preliminary experiments were also performed in order to demonstrate the proposed control method.