MEMS Rotary Actuator using an Integrated Ball Bearing and Air Turbine

The first silicon air-driven rotary actuation mechanism based on encapsulated ball bearings is reported. The method of integrating a silicon air turbine with a ball bearing support mechanism has been developed for silicon turbomachinery and tribological investigations. Rotational speeds up to 37,000 rpm and continuous operation longer than 24 hours were measured. Qualitative analysis is also presented, shedding light on silicon/ball wear and methods for increasing bearing lifetime and speeds.