多层感觉结构

Физика и техника полупроводников Pub Date : 2022-09-02 DOI:10.21883/ftp.2022.06.52592.9819

В. В. Болотов, Е. В. Князев, И. В. Пономарева, К.Е. Ивлев

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摘要

摘要本工作致力于基于多孔硅膜的传感器结构的创建。所研究的结构集成了用作胃传输层的多孔层和非化学计量的二氧化物气敏层。本文研究了膜的结构形态，并展示了膜在多孔硅上的透气性。研究了通过含NO2的气体-空气混合物获得的测试结构的气敏性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Многослойная сенсорная структура на основе пористого кремния

Abstract The work is devoted to the creation of a sensor structure based on a porous silicon membrane. The structure under study integrates a porous layer used as a gas transport layer and a gas sensitive layer of non-stoichiometric tin oxide. The paper investigates the morphology of the structure and shows the gas permeability of the membrane on porous silicon. The gas sensitivity of the test structure obtained by passing a gas- air mixture containing NO2 has been studied.

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Физика и техника полупроводников

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