超临界流体中纳秒脉冲激光退火后氮化碳纳米柱膜的结构特征

2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP) Pub Date : 2020-11-09 DOI:10.1109/NAP51477.2020.9309577

A. Prudnikov, Y. Pashkevich, V. Dmitrenko, M. Pas'ko, V. Chishko

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引用次数: 0

摘要

研究了脉冲激光辐照对纳米柱CNx:O薄膜结构性能的影响与激光脉冲强度和薄膜密度的关系。对放置在液体中的氮化碳薄膜进行了激光退火。用拉曼光谱法测定了脉冲激光辐照后纳米柱CNx:O薄膜的结构变化。结果表明，经过退火处理后，薄膜中的氮碳比随激光辐照强度的增大而增大。通过扫描电子显微镜和拉曼光谱的方法证实了激光退火对结构变化的效率取决于纳米柱结构的密度。

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Structural Features of Carbon Nitride Nanocolumnar Films after Nanosecond Pulsed Laser Annealing in a Supercritical Fluid

The effect of pulsed laser irradiation on the structural properties of nanocolumnar CNx:O films in dependence on the intensity of laser pulses and film density have been investigated. The laser annealing was carried out for carbon-nitride films placed in a liquid. The structural changes in nanocolumnar CNx:O films after the influence of pulsed laser irradiation have been determined by Raman spectroscopy. It was found that after annealing procedure the nitrogen/carbon ratio in the films increases under the laser irradiation intensity increase. It has been established by the methods of scanning electron microscopy and Raman spectroscopy that efficiency of the laser annealing for structural changes depends on the density of the nanocolumnar structures.

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2020 IEEE 10th International Conference Nanomaterials: Applications & Properties (NAP)

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