光学医疗用直流溅射镀膜工艺的最新进展

Q4 Materials Science

International Journal of Thin Film Science and Technology Pub Date : 2021-09-01 DOI:10.18576/ijtfst/100312

A. Jawad

{"title":"光学医疗用直流溅射镀膜工艺的最新进展","authors":"A. Jawad","doi":"10.18576/ijtfst/100312","DOIUrl":null,"url":null,"abstract":"Nano thin films and nano coating have been applied in different fields in health care system because of their higher antiviral properties. Additionally, as the world have suffered since December 2019 from Covid-19 situation, different scientists and industrials people have tried to apply nano antiviral films and coatings in our daily life. In this mini review, nano thin film coating procedure by DC sputtering technique has been reviewed, investigated and evaluated by using different materials and device parameters in recent years. This report focuses on device factors that affect the thickness of nano-lhin films for optical and optic electric applications, these parameters including time, temperature, power, pressure and flow rate of gases, the review provides more understanding meaning of the coating procedure by DC sputtering process. © 2023 PCSIR-Scientific Information Centre. All rights reserved.","PeriodicalId":37038,"journal":{"name":"International Journal of Thin Film Science and Technology","volume":"98 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2021-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Recent Developments in Coating Procedure by Using Direct Current (DC) Sputtering for Optical-Medical Applications\",\"authors\":\"A. Jawad\",\"doi\":\"10.18576/ijtfst/100312\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nano thin films and nano coating have been applied in different fields in health care system because of their higher antiviral properties. Additionally, as the world have suffered since December 2019 from Covid-19 situation, different scientists and industrials people have tried to apply nano antiviral films and coatings in our daily life. In this mini review, nano thin film coating procedure by DC sputtering technique has been reviewed, investigated and evaluated by using different materials and device parameters in recent years. This report focuses on device factors that affect the thickness of nano-lhin films for optical and optic electric applications, these parameters including time, temperature, power, pressure and flow rate of gases, the review provides more understanding meaning of the coating procedure by DC sputtering process. © 2023 PCSIR-Scientific Information Centre. All rights reserved.\",\"PeriodicalId\":37038,\"journal\":{\"name\":\"International Journal of Thin Film Science and Technology\",\"volume\":\"98 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Thin Film Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.18576/ijtfst/100312\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Thin Film Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.18576/ijtfst/100312","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}

引用次数: 0

摘要

纳米薄膜和纳米涂层由于具有较高的抗病毒性能，在医疗保健系统中得到了广泛的应用。此外，自2019年12月以来，随着全球遭受Covid-19疫情的影响，不同的科学家和工业界人士试图在我们的日常生活中应用纳米抗病毒薄膜和涂层。本文对近年来采用直流溅射技术制备纳米薄膜的方法进行了综述、研究和评价。本文重点介绍了影响光学和光电应用中纳米薄膜厚度的器件因素，这些参数包括时间、温度、功率、压力和气体流速，综述了直流溅射工艺涂层过程的更多理解意义。©2023 pcsir -科学信息中心。版权所有。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Recent Developments in Coating Procedure by Using Direct Current (DC) Sputtering for Optical-Medical Applications

Nano thin films and nano coating have been applied in different fields in health care system because of their higher antiviral properties. Additionally, as the world have suffered since December 2019 from Covid-19 situation, different scientists and industrials people have tried to apply nano antiviral films and coatings in our daily life. In this mini review, nano thin film coating procedure by DC sputtering technique has been reviewed, investigated and evaluated by using different materials and device parameters in recent years. This report focuses on device factors that affect the thickness of nano-lhin films for optical and optic electric applications, these parameters including time, temperature, power, pressure and flow rate of gases, the review provides more understanding meaning of the coating procedure by DC sputtering process. © 2023 PCSIR-Scientific Information Centre. All rights reserved.

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来源期刊

International Journal of Thin Film Science and Technology Materials Science-Surfaces, Coatings and Films

CiteScore

1.60

自引率

0.00%

发文量