脉冲CO2激光在硅中的吸收及其引起的激光烧蚀和表面损伤的形成

T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi
{"title":"脉冲CO2激光在硅中的吸收及其引起的激光烧蚀和表面损伤的形成","authors":"T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi","doi":"10.1016/S1288-3255(99)80003-3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"2 1","pages":"23-28"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":"{\"title\":\"Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation\",\"authors\":\"T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi\",\"doi\":\"10.1016/S1288-3255(99)80003-3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":101031,\"journal\":{\"name\":\"Plasmas & Ions\",\"volume\":\"2 1\",\"pages\":\"23-28\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"8\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasmas & Ions\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1016/S1288-3255(99)80003-3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S1288-3255(99)80003-3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 8

摘要

本文章由计算机程序翻译,如有差异,请以英文原文为准。
Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信