石英温度和压力传感器

ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics Pub Date : 1996-08-18 DOI:10.1109/ISAF.1996.598093

Y. Poplavko, L. Pereverzeva

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引用次数: 1

摘要

热释电效应和体积压电效应是对标量影响的矢量响应，通常只有在对称性属于热释电的晶体中才有可能。作为微电子的好材料，无应力石英不具有热释电性。我们利用部分箝位条件，通过降低晶体的响应对称性，将其转化为“人工热释电”晶体。

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Quartz temperature and pressure sensors

Pyroelectric effect as well as volumetric piezoeffect are vectorial responses on scalar influences that usually are possible only in the crystals which symmetry belongs to pyroelectrics. Being good material for microelectronics, stress-free quartz is not pyroelectric. We use partial clamping conditions to convert this crystal into "artificial pyroelectric" by decrease its response symmetry.

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ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics

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