Ming C. Wu, T. J. Seok, Kyungmok Kwon, Johannes Henriksson, Jianheng Luo
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Large Scale Silicon Photonics Switches Based on MEMS Technology
We review the recent developments in large-scale silicon photonic switches, focusing on MEMS-based switches that enables high port-count (128×128), low optical loss (0.05 dB/port), low crosstalk, broadband operation, sub-microsecond response time, and low power consumption.