室温下高探测率的谐振腔耦合红外探测器

2013 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2013-11-11 DOI:10.1109/OMN.2013.6659057

A. Gawarikar, R. Shea, J. Talghader

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引用次数: 0

摘要

报道了一种峰检出率在3×109 cm Hz1/2/W ~ 4.4×109 cm Hz1/2/W之间的光谱选择性非冷却长波红外探测器。该探测器采用硅微加工技术制造，并将热电读出器与谐振光学腔集成在一起，以实现波长选择性吸收。

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Resonant cavity coupled infrared detectors with high detectivity operating at room temperature

A spectrally selective uncooled long wave infrared detector with peak detectivity between 3×10⁹ cm Hz^1/2/W and 4.4×10⁹ cm Hz^1/2/W is reported. The detector is fabricated using silicon microfabrication techniques and integrates a thermoelectric readout with a resonant optical cavity to achieve wavelength selective absorption.

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2013 International Conference on Optical MEMS and Nanophotonics (OMN)

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