Lead the Future : Semiconductor Evolution as Seen by CMP Manufacturers

The global situation has become increasingly uncertain and it has been a long time since the so-called VUCA era began. The semiconductor market, however, is now booming and semiconductor technology seems to have overcome its stagnation. The market has now entered the so-called Multi-driver era, driven by the IoT, Cloud, AI, Car, and 5G applications, collectively referred to as ICAC5, in addition to the former single set applications, such as PCs and mobile phones. Technologies adapted to the ICAC5 market have also been developed, and device development has been active in three directions: MM (More Moore), MtM (More than Moore), and BC (Beyond CMOS). With the development of semiconductor devices, new technologies are also required for manufacturing equipment such as CMP. Based on the uncertain global outlook, this paper provides an overview of device technology up to 2030 by showing the uniqueness of the semiconductor market, and presents as an example how the CMP process should evolve. Semiconductors are immortal as long as there is human desire. Semiconductors will continue to lead the future of technologies. And semiconductor manufacturing equipment will continue to support the evolution of semiconductor devices.