一种高性能光机械质量传感器

Yeping Zhang, Jie Ai, Yanjun Xiang, Qinghua He, Tao Li
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引用次数: 2

摘要

提出了一种有效运动质量小于10fg、机械频率大于10GHz的基于分裂纳米光束光机械晶体腔的质量传感器。通过仿真,可以实现超过10MHz/fg的检测灵敏度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A high performance optomechanical mass sensor
A mass sensor based on split-nanobeam optomechanical crystal cavity with effective motion mass below 10fg and mechanical frequency exceed 10GHz is proposed. Based on our simulation, exceed 10MHz/fg detection sensitivity can be realized.
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