氮化铝谐振器和滤波器在高温和高功率下的分析

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808282

Arash Fouladi Azarnaminy, R. Mansour

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引用次数: 1

摘要

本文对氮化铝(AlN)在硅谐振器上宽温度范围工作的性能进行了实验研究。谐振器的测量温度范围为-196°C至+120°C。在8dBm到20dBm的输入功率范围内，给出了该谐振器的线性和非线性特性。文中还介绍了用这种谐振器设计的三极带通滤波器的测量结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Analysis of Aluminum Nitride Resonators and Filters Over Temperature and Under High Power

This paper presents an experimental investigation of the performance of Aluminum Nitride (AlN) on Silicon resonators operating over a wide temperature range. The resonators are measured over the temperature range of -196°C to +120°C. Linear and nonlinear characterization of the proposed resonator is presented over an input power range from 8dBm to 20dBm. The paper also presents measured results of a 3-pole band-pass filter designed using such type of resonators.

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来源期刊

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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