硅尖与垂直碳纳米管复合结构的场发射

S.X. Chen, J.J. Li, C. Gu
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引用次数: 2

摘要

采用等离子体增强热丝化学气相沉积(PE-HFCVD)方法在硅片上制备了硅尖与垂直排列碳纳米管(CNTs)的复合结构,并将镀在衬底上的Au/Ni薄膜作为催化剂。制备过程中使用96%体积百分比的高比例氢气和高总压,通过改变总压可以分别制备出纯碳纳米管、纯硅尖端和硅尖端与碳纳米管的混合物。扫描电镜测量结果表明,垂直排列的CNTs中有Si尖端形成,并对其形成机理进行了讨论。场发射测量结果表明,该复合结构具有极好的场发射性能——低阈值场、高发射电流密度和稳定的发射电流,这是由于该复合结构提高了场增强因子和减小了场屏蔽效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Field emission from the composite structure of silicon tips and vertical carbon nanotubes
The composite structure of silicon tips and vertical aligned carbon nanotubes (CNTs) was prepared using plasma enhanced hot filament chemical vapor deposition (PE-HFCVD) method on the silicon wafer, and Au/Ni film coated on the substrate was considered as a catalyst. High proportion hydrogen of 96% volume percentage and high total pressure are used during preparing process, and the pure CNTs, pure silicon tips, and the admixture of silicon tips and CNTs can be prepared by varying the total pressures, respectively. Scanning electron microscopy measurement shows that Si tips are formed in the vertical aligned CNTs, and the related formation mechanism of this admixture was discussed. The results of field emission measurement show that this composite structure has very excellent electron field emission properties - low threshold field, high emission current density and stable emission current, which are attributed to the increased field enhancement factor and reducing field shield effect for this composite structure.
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