基于绝缘体上硅的短波红外集成光谱仪和集成探测器

E. Ryckeboer, A. Gassenq, N. Hattasan, B. Kuyken, L. Cerutti, J. B. Rodriguez, É. Tournié, G. Roelkens, W. Bogaerts, R. Baets
{"title":"基于绝缘体上硅的短波红外集成光谱仪和集成探测器","authors":"E. Ryckeboer, A. Gassenq, N. Hattasan, B. Kuyken, L. Cerutti, J. B. Rodriguez, É. Tournié, G. Roelkens, W. Bogaerts, R. Baets","doi":"10.1364/CLEO_SI.2012.CTU1A.3","DOIUrl":null,"url":null,"abstract":"We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 μm. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.","PeriodicalId":6442,"journal":{"name":"2012 Conference on Lasers and Electro-Optics (CLEO)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2012-05-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Integrated spectrometer and integrated detectors on Silicon-on-Insulator for short-wave infrared applications\",\"authors\":\"E. Ryckeboer, A. Gassenq, N. Hattasan, B. Kuyken, L. Cerutti, J. B. Rodriguez, É. Tournié, G. Roelkens, W. Bogaerts, R. Baets\",\"doi\":\"10.1364/CLEO_SI.2012.CTU1A.3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 μm. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.\",\"PeriodicalId\":6442,\"journal\":{\"name\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-05-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Conference on Lasers and Electro-Optics (CLEO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/CLEO_SI.2012.CTU1A.3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2012.CTU1A.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

摘要

设计了一种中心波长为2.15 μm的绝缘体上硅衬底微型光谱仪。该光谱仪采用平面凹光栅(PCG)结构,具有6通道,通道间距为4 nm,串扰为-12 dB。我们研究了异质集成光栅辅助GaInAsSb光电二极管,用于未来的探测器阵列实现。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Integrated spectrometer and integrated detectors on Silicon-on-Insulator for short-wave infrared applications
We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 μm. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信