E. Ryckeboer, A. Gassenq, N. Hattasan, B. Kuyken, L. Cerutti, J. B. Rodriguez, É. Tournié, G. Roelkens, W. Bogaerts, R. Baets
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Integrated spectrometer and integrated detectors on Silicon-on-Insulator for short-wave infrared applications
We present a miniature spectrometer fabricated on a Silicon-on-Insulator substrate with center wavelength at 2.15 μm. The spectrometer is a planar concave grating (PCG) with 6 channels and 4 nm channel spacing with a crosstalk of -12 dB. We investigate heterogeneously integrated grating-assisted GaInAsSb photodiodes for future implementation as detector array.
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