薄膜体声波压电谐振器的瞬态过程

IF 1.3 4区 物理与天体物理 Q4 PHYSICS, CONDENSED MATTER
Guang-ying Yang, Jianke Du, Ji Wang, Jia-shi Yang
{"title":"薄膜体声波压电谐振器的瞬态过程","authors":"Guang-ying Yang, Jianke Du, Ji Wang, Jia-shi Yang","doi":"10.1080/07315171.2017.1397446","DOIUrl":null,"url":null,"abstract":"ABSTRACT We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6 mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 µm thickness, a fundamental thickness-extensional frequency of 1–2 GHz, and a damping described by a material quality factor of 105, the characteristic startup time from rest to time-harmonic motion is about 0.1 millisecond.","PeriodicalId":50451,"journal":{"name":"Ferroelectrics Letters Section","volume":null,"pages":null},"PeriodicalIF":1.3000,"publicationDate":"2017-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Transient processes in thin film bulk acoustic wave piezoelectric resonators\",\"authors\":\"Guang-ying Yang, Jianke Du, Ji Wang, Jia-shi Yang\",\"doi\":\"10.1080/07315171.2017.1397446\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ABSTRACT We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6 mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 µm thickness, a fundamental thickness-extensional frequency of 1–2 GHz, and a damping described by a material quality factor of 105, the characteristic startup time from rest to time-harmonic motion is about 0.1 millisecond.\",\"PeriodicalId\":50451,\"journal\":{\"name\":\"Ferroelectrics Letters Section\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2017-11-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Ferroelectrics Letters Section\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1080/07315171.2017.1397446\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Ferroelectrics Letters Section","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/07315171.2017.1397446","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
引用次数: 0

摘要

本文研究了6 mm级晶体压电片作为薄膜体声波谐振器的电强迫瞬态厚度-拉伸振动。得到了广义傅里叶级数解,并与有限元数值分析进行了对比验证。研究了谐振器启动和关闭的瞬态过程。研究发现,对于厚度为2µm、基频-外延频率为1 ~ 2 GHz、材料质量系数为105的ZnO或AlN薄膜谐振器,从静止到时谐运动的特征启动时间约为0.1毫秒。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Transient processes in thin film bulk acoustic wave piezoelectric resonators
ABSTRACT We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6 mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 µm thickness, a fundamental thickness-extensional frequency of 1–2 GHz, and a damping described by a material quality factor of 105, the characteristic startup time from rest to time-harmonic motion is about 0.1 millisecond.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Ferroelectrics Letters Section
Ferroelectrics Letters Section 物理-物理:凝聚态物理
CiteScore
1.10
自引率
0.00%
发文量
1
审稿时长
4.8 months
期刊介绍: Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals. Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信