薄膜体声波压电谐振器的瞬态过程

IF 1.3 4区物理与天体物理 Q4 PHYSICS, CONDENSED MATTER

Ferroelectrics Letters Section Pub Date : 2017-11-02 DOI:10.1080/07315171.2017.1397446

Guang-ying Yang, Jianke Du, Ji Wang, Jia-shi Yang

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引用次数: 0

摘要

本文研究了6 mm级晶体压电片作为薄膜体声波谐振器的电强迫瞬态厚度-拉伸振动。得到了广义傅里叶级数解，并与有限元数值分析进行了对比验证。研究了谐振器启动和关闭的瞬态过程。研究发现，对于厚度为2µm、基频-外延频率为1 ~ 2 GHz、材料质量系数为105的ZnO或AlN薄膜谐振器，从静止到时谐运动的特征启动时间约为0.1毫秒。

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Transient processes in thin film bulk acoustic wave piezoelectric resonators

ABSTRACT We studied electrically forced, transient thickness-extensional vibration of piezoelectric plates of crystals of class 6 mm as thin film bulk acoustic wave resonators. A generalized Fourier series solution was obtained and verified by comparison with finite element numerical analysis. The transient processes of the startup or shutting down of a resonator was examined. It was found that for a typical thin film resonator of ZnO or AlN with a 2 µm thickness, a fundamental thickness-extensional frequency of 1–2 GHz, and a damping described by a material quality factor of 105, the characteristic startup time from rest to time-harmonic motion is about 0.1 millisecond.

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来源期刊

Ferroelectrics Letters Section 物理-物理：凝聚态物理

CiteScore

1.10

自引率

0.00%

发文量

审稿时长

4.8 months

期刊介绍： Ferroelectrics Letters is a separately published section of the international journal Ferroelectrics. Both sections publish theoretical, experimental and applied papers on ferroelectrics and related materials, including ferroelastics, ferroelectric ferromagnetics, electrooptics, piezoelectrics, pyroelectrics, nonlinear dielectrics, polymers and liquid crystals. Ferroelectrics Letters permits the rapid publication of important, quality, short original papers on the theory, synthesis, properties and applications of ferroelectrics and related materials.