采用光纤放大器和非线性波长转换的193nm光源

LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242) Pub Date : 2001-11-12 DOI:10.1109/LEOS.2001.969170

S. Owa, M. Doi, H. Kawai, H. Kitano, S. Miwa, H. Matsuura, A. Tokuhisa

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引用次数: 2

摘要

紧凑紫外光源的一种方法是全固态193nm激光系统，该系统利用1547nm波长的掺铒光纤放大器(EDFA)作为基本光源的一部分，以及用于产生193nm光的八次谐波的五级变频光学器件。我们提出使用Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/作为四谐波晶体来改善波长转换光学，并报告了长达500小时的耐久性测试结果。

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A 193 nm light source using fiber amplifier and nonlinear wavelength conversion

One approach to compact UV light sources is an all-solid-state 193 nm laser system, which utilizes an Er-doped fiber amplifier (EDFA) of 1547 nm wavelength as part of the fundamental light source, and five-stage frequency conversion optics for generating the eighth harmonic of 193 nm light. We propose the use of Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/ as the fourth-harmonic crystal to improve the wavelength conversion optics, and report the results of durability tests up to 500 hours.

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LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242)

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