高掺杂InP表面等离子体

M. E. Aryaee Panah, L. Ottaviano, E. Semenova, A. Lavrinenko
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引用次数: 0

摘要

采用金属-有机气相外延法(MOVPE)生长掺杂硅的InP,优化生长参数,获得较高的自由载流子浓度。利用FTIR测量了生长样品在中红外范围内的反射率,并利用结果反演了介电函数的参数。利用导出的介电函数模拟了由生长材料制成的衍射光栅对表面等离子体激元的激发。采用标准的纳米加工技术制备光栅结构。光栅的光谱特征与模拟结果吻合良好,在预测的入射角和波长处显示出spp耦合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Surface plasmons on highly doped InP
Silicon doped InP is grown by metal-organic vapor phase epitaxy (MOVPE) using optimized growth parameters to achieve high free carrier concentration. Reflectance of the grown sample in mid-IR range is measured using FTIR and the result is used to retrieve the parameters of the dielectric function. The derived dielectric function is used to simulate the excitation of surface plasmons by a diffraction grating made of the grown material. The grating structure is fabricated using standard nanofabrication techniques. Spectral features from the grating agree well with the simulations and show spp coupling at predicted angles of incidence and wavelengths.
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