射频溅射对SrTiO3薄膜性能的影响

{"title":"射频溅射对SrTiO3薄膜性能的影响","authors":"","doi":"10.18576/ijtfst/120208","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":37038,"journal":{"name":"International Journal of Thin Film Science and Technology","volume":"48 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Effect of RF Sputtered on Characterization of SrTiO3 Thin Film\",\"authors\":\"\",\"doi\":\"10.18576/ijtfst/120208\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":37038,\"journal\":{\"name\":\"International Journal of Thin Film Science and Technology\",\"volume\":\"48 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Journal of Thin Film Science and Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.18576/ijtfst/120208\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"Materials Science\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Journal of Thin Film Science and Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.18576/ijtfst/120208","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"Materials Science","Score":null,"Total":0}